OHB/UTS N2 purge
OVERHEAD HOIST BUFFER / Under track system
N2 Purge System
We provide purging buffer for wafer/reticle carrier purification.
OHB N2 purge system is located below the track and utilized for mass storage of FOUPs, capable of speeding up transfer time when combined with OHT system. This product reduces the humidity and oxygen inside the FOUP to achieve better product Q-time and improve the yield rate
Description
OHB N2 purge system is used in the front-end process and is installed under the Fab automation track. It's specially designed to remove humidity and oxygen to extend Q-time
Features
• FDC& Alarm Function with RFID system
• Fixed flow or Mass flow control on purging air
• One controller corresponds to four purge ports
• Humidity sensor equipped
• Support recipe function
SPEC
Our E-Rack is available for handling tools such as FOUP, Open Cassette and SMIF Pod
Friendly
interface
Reliable
Improve
Yield
Reduced Human
generate error
Programmable
Humble beginning from 2022,
Brillian USA operating out of a suburban location in Scottsdale, Arizona.
We are a world leader in innovative automation solutions that transform how the world uses technology. For over 30 years, our company has been instrumental to the world’s most significant technology advancements, delivering optimal yield purification products and customized automation systems for a broad range of applications. We are here to provide cutting-edge purge system to most advanced semiconductor Fab in the U.S.
Deploying resources strategically has allowed Brillian to take full advantage of the strength in the US, enabling us to tailor-make products, service programs and offer more diverse and globalized customer services.
Deploying resources strategically has allowed Brillian to take full advantage of the strength in the US, enabling us to tailor-make products, service programs and offer more diverse and globalized customer services.
E-Rack Management Systems
Regional
The usage of shelves in each area can be monitored, and fine-tuning can be made at any time to improve efficiency.
Individuality
Independently monitor the operation of the racks to observe their usage and errors.
Productivity Improvement
Auxiliary electronic bracelet to record handling routes and batches, which is convenient for personnel assessment.